1. 제 목 : Carbon Nanotube (CNT) Growth Using An Atmospheric Pressure
Plasma Jet Process And Initial Device Tests.
2. 발표자 : LAWRENCE J. OVERZET (University of Texas at Dallas)
3. 일 시 : 2005년 12월 1일(목) 오후4시
4. 장 소 : 경북대 공대 11호관 103호
5. 초청교수 : 이 정 희 교수
6. 강사약력
- B.S. in Electrical Engineering, May, 1983, University of Illinois,
College of Engineering, Urbana, IL. E. C.
Jordan award, Schlumberger Scholarship award, Bronze Tablet (Summa
Cum Laude) with High Honors.
- M. S. in Electrical Engineering, January, 1986, University of
Illinois, College of Engineering, Urbana, IL. under Dr. Joseph
T. Verdeyen. Recipient of an American Electronics Association
Fellowship.
- Ph.D. in Electrical Engineering, October, 1988, University of
Illinois, College of Engineering, Urbana, IL. under Dr. Joseph T.
Verdeyen.
7. 내용요약 :
Many of the recent breakthroughs in nanotechnology have involved either the development of carbon nanotubes (CNTs) or their uses. CNTs (especially single wall CNTs) can have extraordinary electrical, mechanical, and thermal characteristics. For example: the Young''''''''''''''''s modulus of CNTs can be 20-30 times larger than that of steel despite the fact that themass density of CNTs is much less than aluminum. The thermal conductivity of CNTs can exceed that of diamond and is expected to be anisotropic. While Single-Wall CNTs (SWNTs) can be synthesized using a Chemical Vapor Deposition (CVD) process in a high pressure furnace; it is often the case that Multi-Walled CNT (MWNT) "forests" are synthesized at reduced temperatures. Other methods can (and are) used to produce both SW and MWNTs such as electric arc discharges and laser ablation, but CVD remains the most controllable process.We have developed and use a modified form of CVD to grow (MWNTs).In this process, we combine an atmospheric pressure Plasma jet to assist in cracking apart the carbon precursors and enhance the growth of the MWNTs. This process allows us to grow CNTs at very high rates over conceivably very large substrate areas in a continuous fashion. Our present plasma source is severely limited in power and as a result breaks apart only a small fraction of the precursor gas. Still, this promotes the growth of reasonably tall, entangled "forests" of MWNTs. These forests can be patterned and show promise for sensor applications. As one example, we have tested a 4-probe setup to measure the tube-tube connection resistance as a function of the ambient conditions.
8. 주최 : 반도체공정교육 및 지원센터(NECST), BK21 정보기술연구사업단,
전자전기컴퓨터학부
|
